工件查找步骤和故障对应

4: Search failure occurs in the low slot of the cassette when wafer-search is started.

The warming up time from when wafer-search is started is short. After turning ON the sensor light source, set the wakeup time of the sensor before wafer-search is started. (* The procedure varies depending on the specification.) Refer to the functions of wafer-search in the instruction manual.

When the start position of wafer-search is too close to the first slot, it falls within the range of “6: Setting of the detection gate width of wafer (WWG setting)” and it may cause an error in the wafer detection of the lowest slot. As specified in “9: Teaching and setting of the start position of wafer-search”, change the start position of wafer-search.

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