工件查找步骤和故障对应
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Wafer-Search Operation Procedure
For wafer-search, follow the procedures as follows.
- Prepare the necessary equipment
- Wafer-search setting 1: Setting of the lowest slot of the cassette (WLO setting)
- Wafer-search setting 2: Setting of the highest slot of the cassette (WHI setting)
- Wafer-search setting 3: Setting of the number of cassette slots (WFC setting)
- Wafer-search setting 4: Setting of the minimum detection width of wafer (WWN setting)
- Wafer-search setting 5: Setting of the maximum detection width of wafer (WWM setting)
- Wafer-search setting 6: Setting of the detection gate width of wafer (WWG setting)
- Wafer-search setting 7: Setting of the stop position of wafer search completion (WEND setting)
- Wafer-search setting 8: Setting of the speed of wafer search (WSP setting)
- Wafer-search setting 9: Teaching and setting of the start position of wafer search
- Wafer-search setting 10: Execution of wafer search
- Wafer-search setting 11: Reading out of the wafer search results
- Wafer-search setting 12: Reading out of the detection width of wafer search
- Wafer-search setting 13: Output the results of wafer-search to I/O
- Wafer-search setting 14: Output the results of wafer-search and the wafer condition to I/O
Wafer-Search Troubleshooting
- 1: Wafer-search sensor does not respond.
- 2: Error “E08” or “Command Error” occurs and wafer-search does not start.
- 3: Search failure occurs in the middle slot of the cassette when wafer-search is started.
- 4: Search failure occurs in the low slot of the cassette when wafer-search is started.
- 5: Search failure occurs in the top slot of the cassette when wafer-search is started.
- 6: Search failure occurs when wafer-search is started using a thin wafer.
- 7: Some wafers cannot be detected with wafer-search.
- 8: A wafer placed diagonally over the higher and lower cassettes cannot be detected when wafer-search is started.
- 9: A wafer cannot be detected when wafer-search is started after cassettes have been changed.
- 10: After changing wafer-search data and its setting, wafer-search data is found to disappear.
- 11: The results of wafer-search differ between via Parallel I/O and via serial communication.
- 12: The results or wafer-search differ from the actual wafer condition.