工件查找步骤和故障对应

5: Setting of the maximum detection width of wafer (WWM setting)

Set the maximum detection width of wafer to be used.
When the width detected in the wafer search is larger than the maximum detection width, it is judged as thickness error.
Set the maximum detection width of wafer via serial communication.
Input the following commands for configuration:

Input the maximum detection width in "DEC".

Obtain the current designated data
Data to be set

---

---

[an error occurred while processing this directive]