工件查找步骤和故障对应

10: Execution of wafer-search

Before executing the start position of wafer-search, make sure that the robot is in the start position of wafer-search.

Execute wafer-search via serial communication.
Input the following commands for configuration:

This operation turns on the wafer detection sensor which executes wafer-search.

This operation executes the performance of wafer detection only.

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